Table-top 50-W laser system for ultra-fast laser ablation

被引:64
作者
Luther-Davies, B [1 ]
Kolev, VZ
Lederer, MJ
Madsen, NR
Rode, AV
Giesekus, J
Du, KM
Duering, M
机构
[1] Australian Natl Univ, Res Sch Phys Sci & Engn, Laser Phys Ctr, Canberra, ACT 0200, Australia
[2] Fraunhofer Inst Lasertech, D-52074 Aachen, Germany
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2004年 / 79卷 / 4-6期
关键词
D O I
10.1007/s00339-004-2626-x
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have built a mode-locked Nd:YVO4 laser with a very long resonator which produces an average power of 50 W in 13-ps pulses at 1064 nm and was designed for applications in micro-machining, the deposition of optical thin films, and the growth of nano-clusters in the laser-ablated plumes. By operating the laser at very low mode-locking repetition rates (1.5 MHz, 2.6 MHz, and 4.1 MHz), high pulse power is available in a near diffraction limited beam, allowing focused intensities to exceed 10(12) W/cm(2) and permitting efficient evaporation of difficult materials such as Si. The high power also allows conversion into the second harmonic at 532 nm with an efficiency exceeding 80%. Measurements of the ablation mass in experiments with metals show a 30-100 times increase in the ablation rate compared to the conventional low-repetition-rate ns-range lasers.
引用
收藏
页码:1051 / 1055
页数:5
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