Advanced models for the calculation of capillary attraction in axisymmetric configurations

被引:17
作者
Ardito, Raffaele [1 ]
Corigliano, Alberto [1 ]
Frangi, Attilio [1 ]
Rizzini, Francesco [1 ]
机构
[1] Politecn Milan, Dept Civil & Environm Engn, I-20133 Milan, Italy
关键词
Microsystems; Adhesion; Capillary attraction; DER-WAALS FORCES; MICROELECTROMECHANICAL SYSTEMS; LIQUID BRIDGE; SPHERES; ADHESION; SURFACES; STICTION; CONTACT; MEMS;
D O I
10.1016/j.euromechsol.2014.05.002
中图分类号
O3 [力学];
学科分类号
08 ; 0801 ;
摘要
The proper estimate of capillary attraction is of great importance in many situations, for example the reliability assessment of Micro- Electro-Mechanical Systems (MEMS) with respect to spontaneous adhesion. In spite of many theoretical studies, there is a lack of general methods for obtaining the exact shape of the liquid meniscus between the asperities of rough surfaces. In this paper, a new analytical method is developed for the specific case of axysimmetric configurations. The outcomes of such a method are critically compared with the approximate solution which is usually proposed in the literature. Moreover, an improved simplified method is constructed and validated. Finally, a more general procedure (based on the Finite Element Method) is proposed, with possible application to non-symmetric geometries. (C) 2014 Elsevier Masson SAS. All rights reserved.
引用
收藏
页码:298 / 308
页数:11
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