Properties of MTiO3 (M = Sr, Ba) and PbM′O3(M′ = Ti, Zr) Superlattice Thin Films Fabricated by Laser Ablation

被引：0
作者：
Lim, T. M. [1 ,2 ]
Park, J. Y. [1 ,2 ]
Han, J. S. [1 ,2 ]
Hwang, P. G. [1 ,2 ]
Lee, K. H. [3 ]
Jung, K. W. [1 ,2 ]
Jung, D. [1 ,2 ]
机构：
[1] Wonkwang Univ, Dept Chem, Iksan 570749, Jeonbuk, South Korea
[2] Wonkwang Univ, Inst Nat Basic Sci, Iksan 570749, Jeonbuk, South Korea
[3] Wonkwang Univ, Nanoscale Sci & Technol Inst, Iksan 570749, Jeonbuk, South Korea
来源：
BULLETIN OF THE KOREAN CHEMICAL SOCIETY | 2009年 / 30卷 / 01期
关键词：
Superlattice; Laser ablation; Ferroelectric; HETEROEPITAXIAL GROWTH; DIELECTRIC-PROPERTIES; PHASE-TRANSITION; DEPOSITION; BATIO3/SRTIO3;
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
BaTiO3/SrTiO3 and PbTiO3/PbZrO3 superlattice thin films were fabricated on Pt/Ti/SiO2/Si Substrate by the pulsed laser deposition process. The morphologies and physical properties of deposited films were characterized by using X-ray diffractometer, HR-SEM, and Impedance Analyzer. XRD data and SEM images of the films indicate that each layer was well deposited alternatively in the superlattice structure. The dielectric constant of BaTiO3/SrTiO3 superlattice thin film was higher than that of individual BaTiO3 or SrTiO3 film. Same result was obtained in the PbTiO3/PbZrO3 system. The dielectric constant or a superlattice film was getting higher as the number of layer is increased.
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页码：201 / 204
页数：4
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