Plume behavior and thin film deposition by laser ablation using an hellicoidal shadow mask

被引：0

作者：

Marcu, A ^{[1
]}

Grigoriu, C ^{[1
]}

Jang, W ^{[1
]}

Yatsui, K ^{[1
]}

机构：

[1] Natl Inst Lasers Plasma & Radiat Phys, Gas Pulsed Lasers Lab, Bucharest, Romania

来源：

SIOEL '99: SIXTH SYMPOSIUM ON OPTOELECTRONICS | 2000年 / 4068卷

关键词：

PLD; film quality; shadow mask; plume propagation;

D O I：

10.1117/12.378728

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The laser ablation is one of the best ways to obtain smooth thin film deposited on various substrates. However, to obtain a 'droplets-free' surface some special experimental setups are necessary. One of them is the 'eclipse' method, using a plane shadow. mask. Based on studies on the plume behavior in a 'standard' deposition and in a plane shadow mask eclipse deposition, we propose a new shadow mask having an hellicoidal shape, which permit to obtain a better him quality - maximum droplets size about 10 time smaller than for the plane shadow mask. The plume behavior and thin film quality are presented and discussed.

引用

页码：576 / 581

页数：6

共 4 条

[1] BEAM TARGET INTERACTION DURING GROWTH OF YBA2CU3O7-X BY THE LASER ABLATION TECHNIQUE [J].

COHEN, A ;

ALLENSPACHER, P ;

BRIEGER, MM ;

JEUCK, I ;

OPOWER, H .

APPLIED PHYSICS LETTERS, 1991, 59 (17) :2186-2188

[2] TARGET MODIFICATION IN THE EXCIMER LASER DEPOSITION OF YBA2CU3O7-X THIN-FILMS [J].

FOLTYN, SR ;

DYE, RC ;

OTT, KC ;

PETERSON, E ;

HUBBARD, KM ;

HUTCHINSON, W ;

MUENCHAUSEN, RE ;

ESTLER, RC ;

WU, XD .

APPLIED PHYSICS LETTERS, 1991, 59 (05) :594-596

[3] OFF-AXIS LASER DEPOSITION OF YBA2CU3O7-DELTA THIN-FILMS [J].

HOLZAPFEL, B ;

ROAS, B ;

SCHULTZ, L ;

BAUER, P ;

SAEMANNISCHENKO, G .

APPLIED PHYSICS LETTERS, 1992, 61 (26) :3178-3180

[4] DEPOSITION ANGLE-DEPENDENT MORPHOLOGY OF LASER-DEPOSITED YBA2CU3O7 THIN-FILMS [J].

LEE, SG ;

HWANG, DS ;

PARK, YK ;

PARK, JC .

APPLIED PHYSICS LETTERS, 1994, 65 (06) :764-766

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