Morphological change and inhibitory effect on Ag surface by ArF excimer laser irradiation

被引：6

作者：

Tabuchi, S

Tabata, H

Kawai, T

机构：

[1] Minist Finance, Mint Bur, Kita Ku, Osaka 5300043, Japan

[2] Osaka Univ, Inst Sci & Ind Res, Ibaraki, Osaka 5670047, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 3A期

关键词：

silver; corrosion; eximer laser; morphology; SEM; AFM; heat conduction;

D O I：

10.1143/JJAP.39.1268

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have carried out studies of morphologies of silver surfaces irradiated by ArF eximer laser irradiation in vacuum (10(-3) Pa). Three different morphologies were observed corresponding to various laser fluences. In the high irradiation region (above 600 mJ/cm(2)), wave-like ridges and droplets were observed. In the intermediate region (about 200 mJ/cm(2)), ripples were observed. In the low irradiation region (below 70 mJ/cm(2)), changes were not observed using an optical microscope, but were with an atomic force microscope (AFM). We have clarified that laser irradiation in the fluence range below 70 mJ/cm2 yields a silver surface with excellent corrosion-resistant properties.

引用

页码：1268 / 1271

页数：4

共 10 条

[1]

BERGMANN HW, 1990, KEY ENG MAT, V46-7, P29

[2] The effects of the atmosphere on the surface modification of alumina by pulsed-laser-irradiation [J].