Two-Sided Silicon Nanowire Array/Bulk Thermoelectric Power Generator

被引：27

作者：

Xu, Bin ^{[1
]}

Khouri, Wasim ^{[1
]}

Fobelets, Kristel ^{[1
]}

机构：

[1] Univ London Imperial Coll Sci Technol & Med, Dept Elect & Elect Engn, London SW7 2AZ, England

来源：

IEEE ELECTRON DEVICE LETTERS | 2014年 / 35卷 / 05期

关键词：

Energy harvesting; power; silicon nanowire; thermoelectric; PERFORMANCE;

D O I：

10.1109/LED.2014.2307673

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

To improve the output power of n- and p-type Si nanowire array (NWA)/bulk thermoelectric power generators (TEGs) fabricated using metal assisted chemical etching, post-nanowire-etch spin-on-doping (SOD), and arrays on both sides of the bulk are used. Post-process SOD increases the power factor and removes surface depletion/inversion effects while maintaining crystalline NWs. A maximum output power of 3.5 mu W for a p-NWA/bulk/NWA TEG with NWA length of 23 and 24 mu m is obtained for an external temperature difference of 37 degrees C and a TEG area of 25 mm(2).

引用

页码：596 / 598

页数：3

共 17 条

[1] Porosity control in metal-assisted chemical etching of degenerately doped silicon nanowires [J].

Balasundaram, Karthik ;

Sadhu, Jyothi S. ;

Shin, Jae Cheol ;

Azeredo, Bruno ;

Chanda, Debashis ;

Malik, Mohammad ;

Hsu, Keng ;

Rogers, John A. ;

Ferreira, Placid ;

Sinha, Sanjiv ;

Li, Xiuling .

NANOTECHNOLOGY, 2012, 23 (30)

[2] Highly Ordered Vertical Silicon Nanowire Array Composite Thin Films for Thermoelectric Devices [J].

Curtin, Benjamin M. ;

Fang, Eugene W. ;

Bowers, John E. .

JOURNAL OF ELECTRONIC MATERIALS, 2012, 41 (05) :887-894

[3] Monolithically integrated thermoelectric energy harvester based on silicon nanowire arrays for powering micro/nanodevices [J].

Davila, Diana ;

Tarancon, Albert ;

Calaza, Carlos ;

Salleras, Marc ;

Fernandez-Regulez, Marta ;

San Paulo, Alvaro ;

Fonseca, Luis .

NANO ENERGY, 2012, 1 (06) :812-819

[4] New directions for low-dimensional thermoelectric materials [J].

Dresselhaus, Mildred S. ;

Chen, Gang ;

Tang, Ming Y. ;

Yang, Ronggui ;

Lee, Hohyun ;

Wang, Dezhi ;

Ren, Zhifeng ;

Fleurial, Jean-Pierre ;

Gogna, Pawan .

ADVANCED MATERIALS, 2007, 19 (08) :1043-1053

[5]

Futurrex Inc, 2013, SPIN ON DOP

[6] SEEBECK EFFECT IN SILICON [J].

GEBALLE, TH ;

HULL, GW .

PHYSICAL REVIEW, 1955, 98 (04) :940-947

[7]

Goldsmid H.J., 1960, APPL THERMOELECTRICI

[8] Enhanced thermoelectric performance of rough silicon nanowires [J].

Hochbaum, Allon I. ;

Chen, Renkun ;

Delgado, Raul Diaz ;

Liang, Wenjie ;

Garnett, Erik C. ;

Najarian, Mark ;

Majumdar, Arun ;

Yang, Peidong .

NATURE, 2008, 451 (7175) :163-U5

[9]

Hsin-Luen Tsai, 2013, 2013 2nd International Symposium on Next-Generation Electronics (ISNE 2013), P126, DOI 10.1109/ISNE.2013.6512306

[10] Metal-Assisted Chemical Etching of Silicon: A Review [J].

Huang, Zhipeng ;

Geyer, Nadine ;

Werner, Peter ;

de Boor, Johannes ;

Goesele, Ulrich .

ADVANCED MATERIALS, 2011, 23 (02) :285-308

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