Kinetic Monte Carlo simulations of dislocation etch-pits

Chemical mechanical polishing and stress corrosion cracking result from chemical attack at stressed regions. To better understand the combined effects of chemical attack and stress, a kinetic. Monte Carlo (kMC) study of, the formation of dislocation etch pits is being pursued. In the simulations, atoms from a diamond cubic lattice are irreversibly removed with a probability which depends on an atom's number of nearest neighbors as well the local stress developed from its physical location with respect to a dislocation in the lattice. In accordance with experimental observations, both faceted and non-faceted dislocation etch-pits have been observed. Simulations have been performed for various values of the strength to the etchant attack and the. magnitude of the. stress produced by the dislocation.