Ni-Ag thin films as strain-sensitive materials for piezoresistive sensors

被引：32

作者：

Chiriac, H ^{[1
]}

Urse, M ^{[1
]}

Rusu, F ^{[1
]}

Hison, C ^{[1
]}

Neagu, M ^{[1
]}

机构：

[1] Natl Inst R&D Tech Phys, RO-6600 Iasi 3, Romania

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 76卷 / 1-3期

关键词：

Ni-x-Ag1-x; thin films; gauge factor; resistivity; TCR;

D O I：

10.1016/S0924-4247(99)00027-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Some results concerning the electrical, electromechanical and structural properties of Ni-x-Ag1-x (for x values between 0.35 and 0.50) thin films in view of their utilization for manufacturing pressure and force sensors are presented. As compared to the well known Ni-Cu (constantan) alloys, which are widely used for these type of sensors, Ni-x-Ag1-x thin films exhibit gauge factor values of the same order of magnitude, but they are much more corrosion resistant and adherent to the substrate. The influence of composition and post-deposition annealing on the electrical resistance, temperature coefficient of resistance and gauge factor of Ni-x-Ag1-x. thin films is discussed. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：376 / 380

页数：5

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