Ultra-small photonic crystal (PhC)-based test tool for gas permeability of polymers

被引:11
作者
Qiao, Qifeng [1 ,2 ,3 ,4 ]
Peng, Chenyu [1 ]
Xia, Ji [1 ]
Lee, Chengkuo [2 ,3 ,4 ]
Zhou, Guangya [1 ,3 ,4 ]
机构
[1] Natl Univ Singapore, Dept Mech Engn, Singapore 117579, Singapore
[2] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117583, Singapore
[3] Natl Univ Singapore, Ctr Intelligent Sensors, Singapore 117608, Singapore
[4] Natl Univ Singapore, MIMS CISM, Singapore 117608, Singapore
基金
新加坡国家研究基金会;
关键词
REFRACTIVE-INDEX; WAVE-GUIDE; SENSOR; NANOCAVITY; PROTEINS; DESIGN;
D O I
10.1364/OE.27.035600
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present an ultra-small photonic crystal-based test tool for gas permeability of polymers. It features a fully-etched photonic crystal (PhC) structure occupying an area of 20 mu m x 800 mu m on silicon-on-insulator wafer. The light-matter interaction in the PhC cavity with deformed Polydimethylsiloxane (PDMS) under pressure difference was investigated with finite element method and finite-difference time-domain method numerically. Next, three PDMS membranes of different mixing ratios were utilized for the characterization of gas permeation flux. The feasibility and effectiveness of the proposed working mechanism are verified through clearly distinguishing the gas permeability of these three testing samples. Compared with conventional test tools, this proposed test tool has fast response while it consumes less testing gas volume in a testing system with reduced footprint. Potentially, it can be integrated into lab-on-a-chip devices to measure gas permeation in nano scale. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:35600 / 35608
页数:9
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