The Design and Analysis of Piezoresistive Shuriken-Structured Diaphragm Micro-Pressure Sensors

被引：37

作者：

Guan, Taotao ^{[1
]}

Yang, Fang ^{[1
]}

Wang, Wei ^{[1
]}

Huang, Xian ^{[1
]}

Jiang, Boyan ^{[1
]}

Zhang, Dacheng ^{[1
]}

机构：

[1] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2017年 / 26卷 / 01期

关键词：

High sensitivity and linearity; piezoresistive pressure sensor; shuriken-structured diaphragm; SENSITIVITY; LINEARITY; SILICON; RANGES;

D O I：

10.1109/JMEMS.2016.2628781

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presented a novel 0-3 kPa piezoresistive pressure sensor with high sensitivity and linearity. A shuriken-structured diaphragm (SSD) is designed for the first time to solve the conflict between the sensitivity and linearity for piezoresistive pressure sensors. A trade-off between the stress on the diaphragm edge and the deflection of the diaphragm was achieved by this SSD design according to the numerical simulation. The effects of the glass substrate and the passivation films on the sensing performance were also studied numerically and experimentally. The experimental results indicated the present pressure sensor had a sensitivity of 4.72 mV/kPa/V and a linearity of 0.18 % FSO (full scale output) in the pressure range of 0-3 kPa, which were 28.3% and 50% better than the previous works.

引用

页码：206 / 214

页数：9

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