A MEMS Interface IC With Low-Power and Wide-Range Frequency-to-Voltage Converter for Biomedical Applications

被引：14
作者：
Arefin, Md Shamsul [1 ]
Redoute, Jean-Michel [1 ]
Yuce, Mehmet Rasit [1 ]
机构：
[1] Monash Univ, Dept Elect & Comp Syst Engn, Biomed Integrated Circuits & Sensors Lab BICS, Melbourne, Vic 3800, Australia
来源：
IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS | 2016年 / 10卷 / 02期
基金：
澳大利亚研究理事会;
关键词：
Capacitive pH sensor; capacitive sensor; charge pump circuit; frequency-to-voltage converter; inductive sensor; interface circuit; switched-capacitor; MOS VARACTORS; SENSOR; DESIGN; CIRCUIT; CHIP; OSCILLATOR; OFFSET; NOISE;
D O I：
10.1109/TBCAS.2015.2435256
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
This paper presents an interface circuit for capacitive and inductive MEMS biosensors using an oscillator and a charge pump based frequency-to-voltage converter. Frequency modulation using a differential crossed coupled oscillator is adopted to sense capacitive and inductive changes. The frequency-to-voltage converter is designed with a negative feedback system and external controlling parameters to adjust the sensitivity, dynamic range, and nominal point for the measurement. The sensitivity of the frequency-to-voltage converter is from 13.28 to 35.96 mV/MHz depending on external voltage and charging current. The sensitivity ranges of the capacitive and inductive interface circuit are 17.08 to 54.4 mV/pF and 32.11 to 82.88 mV/mH, respectively. A capacitive MEMS based pH sensor is also connected with the interface circuit to measure the high acidic gastric acid throughout the digestive tract. The sensitivity for pH from 1 to 3 is 191.4 mV/pH with 550 mu V-pp noise. The readout circuit is designed and fabricated using the UMC 0.18 mu m CMOS technology. It occupies an area of 0.18 mm(2) and consumes 11.8 mW.
引用
收藏
页码：455 / 466
页数：12
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