Tribological properties of ternary BCN films with controlled composition and bonding structure

被引:42
作者
Caretti, I [1 ]
Jiménez, I
Gago, R
Cáceres, D
Abendroth, B
Albella, JM
机构
[1] CSIC, Inst Ciencia Mat, E-28049 Madrid, Spain
[2] CSIC, Inst Ciencia & Tecnol Polimeros, E-28006 Madrid, Spain
[3] Forschungszentrum Rossendorf, Inst Ion Beam Phys & Mat Res, D-01314 Dresden, Germany
[4] Univ Carlos III Madrid, Dept Fis Aplicada, Madrid 28911, Spain
关键词
BCN; ion assisted deposition; XANES; pin on disk;
D O I
10.1016/j.diamond.2003.09.011
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this work we study the mechanical and tribological properties (hardness, elastic modulus, friction and wear) of BCN coatings with controlled composition and structure. We have considered films of BCxN stoichiometry with different carbon content, and a hexagonal-like structure. The films were grown at room temperature using simultaneous evaporation from two separated boron and carbon sources, assisted by concurrent nitrogen ions. Several techniques were used to assess the composition and bonding structure of the films, including energy dispersive X-ray (EDX), X-ray absorption (XANES) and infrared (IR) spectroscopies. Although the prevalent structure is hexagonal-like, for large carbon contents the films become more amorphous with a diamondlike structure revealed by the decrease of the density of pi* states. The diamond-like BCxN films with large carbon content show good mechanical properties and wear resistance. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:1532 / 1537
页数:6
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