Zone plates for hard X-rays fabricated with the SPCVD technology

被引:6
作者
Artyukov, I. A. [1 ]
Bukreeva, I. N. [1 ]
Chernov, V. A. [2 ]
Feshchenko, R. M. [1 ]
Golant, K. M. [3 ]
Jark, W. [4 ]
Lavrishchev, S. V. [3 ]
Mitrofanov, A. N. [1 ]
Popov, A. V. [5 ]
Vinogradov, A. V. [1 ]
机构
[1] RAS, PN Lebedev Phys Inst, Moscow 119991, Russia
[2] SB RAS, Budker Inst Nucl Phys, Novosibirsk 630090, Russia
[3] RAS, Fiber Opt Res Ctr, Moscow 119333, Russia
[4] Sincrotrone Trieste, I-34012 Trieste, Italy
[5] Pushkov Inst Terr Magnetisum Ionosphere & Radiowa, Troitsk 142190, Russia
基金
俄罗斯基础研究基金会;
关键词
X-ray optics; Zone plate; Fiber optics; SPCVD; SPATIAL-RESOLUTION; MICROSCOPY;
D O I
10.1016/j.nima.2008.12.161
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Fresnel X-ray zone plates, which have been extensively developed for the last 20 years, are widely used for X-ray imaging in the hard part of the X-ray spectrum. In this paper zone plates based on the SPCVD (Surface Plasma Chemical Vacuum Deposition) technology are proposed and their optical properties in the hard X-ray range 10-30 keV are discussed. It will be shown that this technology enables production of zone plates working in the 10-30 keV range based on SiO2/GeO2 multilayer structures. The first zone plate samples based on SPCVD technology have been fabricated and tested. The parameters of the zone plates are: diameter 0.1-2.5 mm, number of zones 1000-2000, focal distance 1-5 m. The X-ray zone plates suggested here, if successful, will dramatically reduce the cost of imaging experiments in the hard X-ray spectral region, while maintaining spatial resolution high enough to be useful for the X-ray microanalysis, X-ray microscopy and focusing of the X-ray radiation. (c) 2009 Published by Elsevier B.V.
引用
收藏
页码:66 / 68
页数:3
相关论文
共 14 条
[1]  
ATTWOOD DT, 1999, SOFT XRAY EXTREME UL, P111
[2]   Soft X-ray microscopy at a spatial resolution better than 15nm [J].
Chao, WL ;
Harteneck, BD ;
Liddle, JA ;
Anderson, EH ;
Attwood, DT .
NATURE, 2005, 435 (7046) :1210-1213
[3]  
Düvel A, 2000, AIP CONF PROC, V507, P607, DOI 10.1063/1.1291219
[4]   Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition [J].
Golant, K. M. ;
Lavrishchev, S. V. ;
Popov, A. V. ;
Artyukov, I. A. ;
Feshchenko, R. M. ;
Mitrofanov, A. N. ;
Vinogradov, A. V. .
APPLIED OPTICS, 2007, 46 (23) :5964-5966
[5]  
GOLANT KM, 2002, PHYS CHEM GLASSES C, V43, P131
[6]   Magnetic soft x-ray microscopy at 15 nm resolution probing nanoscale local magnetic hysteresis (invited) [J].
Kim, Dong-Hyun ;
Fischer, Peter ;
Chao, Weilun ;
Anderson, Erik ;
Im, Mi-Young ;
Shin, Sung-Chul ;
Choe, Sug-Bong .
JOURNAL OF APPLIED PHYSICS, 2006, 99 (08)
[7]   Compact soft x-ray transmission microscopy with sub-50 nm spatial resolution [J].
Kim, KW ;
Kwon, Y ;
Nam, KY ;
Lim, JH ;
Kim, KG ;
Chon, KS ;
Kim, BH ;
Kim, DE ;
Kim, J ;
Ahn, BN ;
Shin, HJ ;
Rah, S ;
Kim, KH ;
Chae, JS ;
Gweon, DG ;
Kang, DW ;
Kang, SH ;
Min, JY ;
Choi, KS ;
Yoon, SE ;
Kim, EN ;
Namba, Y ;
Yoon, KH .
PHYSICS IN MEDICINE AND BIOLOGY, 2006, 51 (06) :N99-N107
[8]  
KIRZ J, 1995, Q REV BIOPHYS, V28, P1
[9]   APPLICATION OF THE PARABOLIC WAVE-EQUATION TO X-RAY-DIFFRACTION OPTICS [J].
KOPYLOV, YV ;
POPOV, AV ;
VINOGRADOV, AV .
OPTICS COMMUNICATIONS, 1995, 118 (5-6) :619-636
[10]   Simulation of high-resolution x-ray zone plates [J].
Kurokhtin, AN ;
Popov, AV .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2002, 19 (02) :315-324