Development of Microsturcture Based on Single-Wall Carbon Nanotube

A fabrication method is devised for integration of long single-wall carbon nanotube (SWNT) into one-dimensional microstructure. Arrays of Me electrode pairs are fabricated on a SiO2 substrate with micro fabrication process; aligned SWNTs with the length up to one millimeter are then synthesized with catalyst of 0.01M FeCl3 ethanol solution. Based on the control of the air flow, at 900 degrees C for 307min with Ar-2 as the carrier gas, ultralong SWNTs formed bridges that electrically connect the electrodes. Contact pad was fabricated with focused ion beam (FIB) techniques. As a demonstration, microstructure based on single-wall nanotube was presented. Sample characterization was carried out with SEM pictures and I-V curves; which shows that this fabrication strategy combining the micro/nano techniques with CVD synthesis method provides the alternative means for the development of microstructure based on nano materials.