Effects of hydrogen peroxide and alumina on surface characteristics of copper chemical-mechanical polishing in citric acid slurries

被引：24

作者：

Chen, JC ^{[1
]}

Tsai, WT ^{[1
]}

机构：

[1] Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 70101, Taiwan

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2004年 / 87卷 / 2-3期

关键词：

electropolishing; surface properties; X-ray photoelectron spectroscopy (XPS); atomic force microscopy (AFM);

D O I：

10.1016/j.matchemphys.2004.06.007

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The roles of H2O2 and alumina on the changes of metal removal rate, surface passivation and surface morphology in citric acid (CA) base slurry in simulated Cu chemical-mechanical polishing (CMP) was investigated. X-ray photoelectron spectroscopy (XPS) analysis indicated that H2O2 assisted oxide formation while citric acid promoted anodic dissolution of copper in various slurries that contained 1 wt.% Al2O3. Atomic force microscopy (AFM) revealed that Al2O3 abrasive particles modified the surface morphology by inducing surface deformation. The results of open circuit potential (OCP) and removal rate measurements clearly demonstrated that there existed a synergistic effect due to the chelating and oxidizing agents in Cu CMP (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：387 / 393

页数：7

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