Advances in ruggedized quartz MEMS inertial measurement units

This paper focuses on a recent addition to this range of sensors by introducing the latest IMU in the MMQ50 series, the MMQ50-200-400, which offers an increased temperature range and vibration capability. System integration is also simplified by the new options of RS232 or RS422 outputs. Another version, the MMQ-G, adds a GPS engine within the same enclosure; the IMU itself is unchanged. This paper provides a description of the Quartz Rate MEMS sensors, the system architecture, and the mechanical design. Particular attention was given to the design of the isolation system, which enables excellent shock survival characteristics. The single-board design improves ruggedness and reduces cost by eliminating connectors. After a brief description of the calibration method, performance data obtained under a variety of environmental conditions is discussed. The paper concludes with a performance update of other Quartz MEMS sensors in development, which will help the reader better understand the capabilities of this technology.