Phase diffractive optical gratings on glass substrates by laser ablation

被引：17

作者：

Flores-Arias, M. T. ^{[1
]}

Castelo, A. ^{[1
]}

Gomez-Reino, C. ^{[1
]}

de la Fuente, G. F. ^{[2
]}

机构：

[1] Escola Univ Opt & Optometria, Dept Appl Phys, GRIN Opt Grp, E-15782 Santiago De Compostela, Spain

[2] Inst Ciencia Mat Aragon U Zaragoza CSIC, E-50018 Zaragoza, Spain

来源：

OPTICS COMMUNICATIONS | 2009年 / 282卷 / 06期

关键词：

BRAGG GRATINGS; FABRICATION; ELEMENTS; REPLICATION; MASKS;

D O I：

10.1016/j.optcom.2008.11.067

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel and rapid laser ablation method for the fabrication of phase diffractive gratings in low-cost glass substrates is presented. The structures are characterized in terms of their shape and physical parameters by confocal microscopy and SEM microscopy. The first-order diffraction efficiency at normal incidence under 632.8 nm wavelength is shown. The influence of the overlap factor on the period grating is studied. (c) 2008 Elsevier B.V. All rights reserved.

引用

页码：1175 / 1178

页数：4

共 21 条

[1] Diffractive optical elements written by photodeposition [J].

Baal-Zedaka, I ;

Hava, S ;

Mirchin, N ;

Margolin, R ;

Zagon, M ;

Lapsker, I ;

Azoulay, J ;

Peled, A .

APPLIED SURFACE SCIENCE, 2003, 208 :226-232

[2] Laser backwriting process on glass via ablation of metal targets [J].

Castelo, A. ;

Nieto, D. ;

Bao, C. ;

Flores-Arias, M. T. ;

Perez, M. V. ;

Gomez-Reino, C. ;

Lopez-Gascon, C. ;

de la Fuente, G. F. .

OPTICS COMMUNICATIONS, 2007, 273 (01) :193-199

[3] Diffractive grey-tone phase masks for laser ablation lithography [J].

David, C ;

Wei, J ;

Lippert, T ;

Wokaun, A .

MICROELECTRONIC ENGINEERING, 2001, 57-8 :453-460

[4] Blazed diffractive optics [J].

Fleming, MB ;

Hutley, MC .

APPLIED OPTICS, 1997, 36 (20) :4635-4643

[5] Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics [J].

Flury, M ;

Benatmane, A ;

Gérard, P ;

Montgomery, PC ;

Fontaine, J ;

Engel, T ;

Schunck, JP ;

Fogarassy, E .

APPLIED SURFACE SCIENCE, 2003, 208 :238-244

[6] Replication technology for optical microsysterns [J].

Gale, MT ;

Gimkiewicz, C ;

Obi, S ;

Schnieper, M ;

Söchtig, J ;

Thiele, H ;

Westenhöfer, S .

OPTICS AND LASERS IN ENGINEERING, 2005, 43 (3-5) :373-386

[7] Surface relief diffraction gratings fabricated in ZnSe by frequency doubled Nd:YAG laser micromachining [J].

Guay, Francis ;

Ozcan, L. C. ;

Kashyap, Raman .

OPTICS COMMUNICATIONS, 2008, 281 (05) :935-939

[8] Development of practical system for laser-induced plasma-assisted ablation (LIPAA) for micromachining of glass materials [J].

Hanada, Y ;

Sugioka, K ;

Gomi, Y ;

Yamaoka, H ;

Otsuki, O ;

Miyamoto, I ;

Midorikawa, K .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (4-6) :1001-1003

[9] Colour marking of transparent materials by laser-induced plasma-assisted ablation (LIPAA) [J].

Hanada, Yasutaka ;

Sugioka, Koji ;

Miyamoto, Iwao ;

Midorikawa, Katsumi .

COLA'05: 8TH INTERNATIONAL CONFERENCE ON LASER ABLATION, 2007, 59 :687-+

[10] BRAGG GRATINGS FABRICATED IN MONOMODE PHOTOSENSITIVE OPTICAL FIBER BY UV EXPOSURE THROUGH A PHASE MASK [J].

HILL, KO ;

MALO, B ;

BILODEAU, F ;

JOHNSON, DC ;

ALBERT, J .

APPLIED PHYSICS LETTERS, 1993, 62 (10) :1035-1037

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