Argon and neon plasma columns in continuous surface wave microwave discharge at atmospheric pressure

被引：17
|
作者：
Czylkowski, D. [1 ]
Jasinski, M. [1 ]
Mizeraczyk, J. [1 ]
Zakrzewski, Z. [1 ]
机构：
[1] Polish Acad Sci, Szewalski Inst Fluid Flow Machinery, Ctr Plasma & Laser Engn, PL-80231 Gdansk, Poland
来源：
CZECHOSLOVAK JOURNAL OF PHYSICS | 2006年 / 56卷
关键词：
microwave discharge; surface wave; continuous regime;
D O I：
10.1007/s10582-006-0271-7
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
In this paper the results of experimental investigations of a surface wave sustained discharge during continuous mode of operation are given. The surfaguide based microwave plasma torch operated at frequency of 2.45 GHz in both neon and argon at atmospheric pressure was used. Measurements of the visually observed plasma column length versus the absorbed microwave power have been done. Also, the influence of the gas flow rate on the plasma column was observed. All reported results were obtained with gas flow rates of up to 101/min and microwave power up to 4 kW. The obtained results can be useful for optimizing the surface wave sustained plasma sources.
引用
收藏
页码：B684 / B689
页数：6
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