Photoconductivity of TiO2 films deposited by PECVD

被引：2
作者：
Kolouch, A.
Hajkova, P.
Spatenka, P.
Heydukova, E.
Exnar, P.
Spatenka, P.
机构：
[1] Tech Univ Liberec, Fac Mech Engn, Dept Mat Sci, Liberec 46117, Czech Republic
[2] Tech Univ Liberec, Fac Educ, Dept Chem, Liberec 46117, Czech Republic
[3] Univ S Bohemia, Dept Phys, CZ-37001 Ceske Budejovice, Czech Republic
来源：
CZECHOSLOVAK JOURNAL OF PHYSICS | 2006年 / 56卷
关键词：
titanium oxide; PECVD; thin films;
D O I：
10.1007/s10582-006-0356-3
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
TiO2 thin films were prepared by PECVD technique from vapors of Titanium-IViso-propoxide mixed with oxygen at different temperatures. The films were deposited on substrates with system of special platinum electrodes and on glass substrates. Absorption spectra in the visible light region, photoconductivity and capacitance at different humidity, pbotocatalytic activity under UV irradiation and surface morphology were evaluated on the films. The results revealed that the photoconductivity is influenced by humidity and is connected to the photocatalytic activity.
引用
收藏
页码：B1237 / B1243
页数：7
相关论文
共 50 条
  • [21] PECVD of amorphous TiO2 thin films:: effect of growth temperature and plasma gas composition
    Battiston, GA
    Gerbasi, R
    Gregori, A
    Porchia, M
    Cattarin, S
    Rizzi, GA
    THIN SOLID FILMS, 2000, 371 (1-2) : 126 - 131
  • [22] Preparation and the light transmittance of TiO2 deposited fabrics
    Xu, Yang
    Wu, Ning
    Wei, Qufu
    Pi, Xiubiao
    JOURNAL OF COATINGS TECHNOLOGY AND RESEARCH, 2009, 6 (04): : 549 - 555
  • [23] The oxygen-deficient TiO2 films deposited by a dual magnetron sputtering
    Sidelev, Dmitrii V.
    Yurjev, Yury N.
    Krivobokov, Valeriy P.
    Erofeev, Evgenii V.
    Penkova, Olga V.
    Novikov, Vadim A.
    VACUUM, 2016, 134 : 29 - 32
  • [24] Synthesis and properties of crystalline TiO2 films deposited by a HIPIMS+ technique
    Wang, Q. M.
    Kwon, Se-Hun
    Hui, Kwun Nam
    Kim, Doo-In
    Hui, Kwan San
    Kim, Kwang Ho
    VACUUM, 2013, 89 : 90 - 95
  • [25] Some Studies on TiO2 Films Deposited by Sol-Gel Technique
    Rao, K. Narasimha
    Vishwas, M.
    Sharma, Sudhir Kumar
    Gowda, K. V. Arjuna
    ADVANCES IN THIN-FILM COATINGS FOR OPTICAL APPLICATIONS V, 2008, 7067
  • [26] Electronic and optical characterisation of TiO2 films deposited from ceramic targets
    Poelman, H
    Poelman, D
    Depla, D
    Tomaszewski, H
    Fiermans, L
    De Gryse, R
    SURFACE SCIENCE, 2001, 482 : 940 - 945
  • [27] Photocatalytic TiO2 thin films deposited inside a tubing by spray pyrolysis
    Miki-Yoshida, M.
    Paraguay D, V. Collins-Martinez F.
    Antunez, W.
    Aguilar-Elguezabal, A.
    REVISTA MEXICANA DE FISICA, 2005, 51 (02) : 106 - 109
  • [28] Optically Active TiO2:Er Thin Films Deposited by Magnetron Sputtering
    Kot, Anna
    Radecka, Marta
    Dorosz, Dominik
    Zakrzewska, Katarzyna
    MATERIALS, 2021, 14 (15)
  • [29] Mechanical properties and structure of TiO2 films deposited on quartz and silicon substrates
    Kulikovsky, V.
    Ctvrtlik, R.
    Vorlicek, V.
    Filip, J.
    Bohac, P.
    Jastrabik, L.
    THIN SOLID FILMS, 2013, 542 : 91 - 99
  • [30] Optical Properties of TiO2 Films Deposited by Reactive Electron Beam Sputtering
    Kruchinin, V. N.
    Perevalov, T. V.
    Atuchin, V. V.
    Gritsenko, V. A.
    Komonov, A. I.
    Korolkov, I. V.
    Pokrovsky, L. D.
    Shih, Cheng Wei
    Chin, Albert
    JOURNAL OF ELECTRONIC MATERIALS, 2017, 46 (10) : 6089 - 6095
12345