Soft-UV photolithography using self-assembled monolayers

被引:33
作者
Critchley, Kevin
Zhang, Lixin
Fukushima, Hitoshi
Ishida, Masaya
Shimoda, Tatsuya
Bushby, Richard J.
Evans, Stephen D. [1 ]
机构
[1] Univ Leeds, Sch Phys & Astron, Leeds LS2 9JT, W Yorkshire, England
[2] Univ Leeds, SOMS Ctr, Leeds LS2 9JT, W Yorkshire, England
[3] Seiko Epson Corp, IO Grp, Technol Platform Res Ctr, Nagano 3990293, Japan
[4] Cambridge Res Lab Epson, Cambridge CB4 0FE, England
基金
英国工程与自然科学研究理事会;
关键词
D O I
10.1021/jp0630370
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We report thiol-on-gold self-assembled monolayers (SAMs) that can be photodeprotected using soft UV irradiation (lambda = 365 nm) to yield CO2H functionalized surfaces complementing those reported previously, which yielded NH2 functionalized surfaces. The photolysis of these SAMs were monitored using a combination of surface sensitive techniques. In the SAM environment the photodeprotection yields are lower than those obtained for equivalent reactions in dilute solution. The protected carboxylic acids SAMs are shown to have a low yield similar to 50% due to competing photoreduction reactions of the nitro group. The results from infrared studies show that, as the photolysis progresses, the long chain protected residues reorganize and shield the functional COOH groups, thereby reducing the hydrophilic character of the surface.
引用
收藏
页码:17167 / 17174
页数:8
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