Peculiarities of the capacitance-voltage characteristic of a photoelectric solar energy convertor based on a silicon p-n junction with a porous silicon antireflection coating

被引:4
作者
Tregulov, V. V. [1 ]
机构
[1] Esenin Ryazan State Univ, Ryazan 390000, Russia
关键词
Porous Silicon; Porous Silicon Layer; Anode Etching; Silicon Crystallite; High Frequency Capacitance;
D O I
10.1134/S1063784214090254
中图分类号
O59 [应用物理学];
学科分类号
摘要
Experimental results on the high-frequency capacitance-voltage characteristic of a photoelectric solar energy converter based on the n (+)-p junction with a thin porous silicon film on the frontal surface are considered. It is shown that the capacitance-voltage characteristic is determined by the surface metal-insulator-semiconductor (MIS) structure formed as a result of growing of a porous silicon layer by electrochemical anode etching. The effective thickness of the insulator layer of the MIS structure, the impurity concentration in its semiconductor region, and the density of surface states are determined.
引用
收藏
页码:1413 / 1414
页数:2
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