The effect of Y and Ba content on the properties of YBaCuO thin films

被引：12

作者：

Schneider, P ^{[1
]}

Linker, G ^{[1
]}

Schneider, R ^{[1
]}

Reiner, J ^{[1
]}

Geerk, J ^{[1
]}

机构：

[1] FORSCHUNGSZENTRUM KARLSRUHE,INST NUKL FESTKORPERPHYS,D-76021 KARLSRUHE,GERMANY

来源：

PHYSICA C | 1996年 / 266卷 / 3-4期

关键词：

D O I：

10.1016/0921-4534(96)00349-8

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

YBaCuO thin films were prepared by co-deposition from three sputtering sources containing cylindrical targets of YCu and BaCu alloys and Cu. The influence of the Ba/Y ratio of the incident flux of material on film growth and properties was studied in detail for substrate temperatures of 700 degrees C and 800 degrees C. It is found that for the lower substrate temperature of 700 degrees C c-axis oriented high quality films on LaAlO3 and MgO substrates are obtained only in a narrow region for the Ba/Y ratio near 1.3. At this composition the films also revealed the best surface quality concerning roughness and outgrowths.

引用

页码：271 / 277

页数：7

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