Active probes and mirofluidic ink delivery for Dip Pen Nanolithography™

被引:3
作者
Rosner, B [1 ]
Duenas, T [1 ]
Banerjee, D [1 ]
Shile, R [1 ]
Amro, N [1 ]
Rendlen, J [1 ]
机构
[1] NanoInk Inc, Corp Off, Chicago, IL 60607 USA
来源
BIOMEMS AND NANOTECHNOLOGY | 2003年 / 5275卷
关键词
DPN; dip pen; nanolithography; SPM; scanning probe microscopy; AFM; bimorph; microfluidic; nanotechnology; lithography;
D O I
10.1117/12.522135
中图分类号
Q5 [生物化学];
学科分类号
071010 ; 081704 ;
摘要
Dip Pen Nanolithography (DPN(TM)) is a scanning probe technique for nanoscale lithography: A sharp tip is coated with a functional molecule (the "ink") and then brought into contact with a surface where it deposits ink via a water meniscus. The DPN process is a direct-write pattern transfer technique with nanometer resolution and is inherently general with respect to usable inks and substrates including biomolecules such as proteins and oligonucleotides. We present functional extensions of the basic DPN process by showing actuated multi-probes as well as microfluidic ink delivery. We present the fabrication process and characterization of such active probes that use the bimorph effect to induce deflection of individual cantilevers as well as the integration of these probes. We also developed the capability to write with multiple inks on the probe array permitting the fabrication of multi-component nanodevices in one writing session. For this purpose, we fabricate passive microfluidic devices and present microfluidic behavior and ink loading performance of these components.
引用
收藏
页码:213 / 222
页数:10
相关论文
共 26 条
[11]  
Demers LM, 2001, ANGEW CHEM INT EDIT, V40, P3069, DOI 10.1002/1521-3773(20010817)40:16<3069::AID-ANIE3069>3.0.CO
[12]  
2-J
[13]   Nanopatterning of "hard" magnetic nanostructures via dip-pen nanolithography and a sol-based ink [J].
Fu, L ;
Liu, XG ;
Zhang, Y ;
Dravid, VP ;
Mirkin, CA .
NANO LETTERS, 2003, 3 (06) :757-760
[14]   A nanoplotter with both parallel and serial writing capabilities [J].
Hong, SH ;
Mirkin, CA .
SCIENCE, 2000, 288 (5472) :1808-1811
[15]   Multiple ink nanolithography: Toward a multiple-pen nano-plotter [J].
Hong, SH ;
Zhu, J ;
Mirkin, CA .
SCIENCE, 1999, 286 (5439) :523-525
[16]  
KRAMER S, 2003, CHEM REV, pA
[17]   Protein nanoarrays generated by dip-pen nanolithography [J].
Lee, KB ;
Park, SJ ;
Mirkin, CA ;
Smith, JC ;
Mrksich, M .
SCIENCE, 2002, 295 (5560) :1702-1705
[18]   Protein nanostructures formed via direct-write dip-pen nanolithography [J].
Lee, KB ;
Lim, JH ;
Mirkin, CA .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2003, 125 (19) :5588-5589
[19]  
Liu XG, 2002, ADV MATER, V14, P231, DOI 10.1002/1521-4095(20020205)14:3<231::AID-ADMA231>3.0.CO
[20]  
2-R