Gas-phase ion chemistry of Si+ and NF3:: An experimental and theoretical study

被引:11
作者
Antoniotti, P.
Operti, L.
Rabezzana, R.
Turco, F.
Vaglio, G. A.
机构
[1] Univ Turin, Dipartimento Chim Gen & Organ Applicata, I-10125 Turin, Italy
[2] Univ Turin, NIS Ctr Excellence, I-10125 Turin, Italy
关键词
gas-phase ion chemistry; Ab initio calculations; ion trap mass spectrometry; silicon ions; nitrogen trifluoride;
D O I
10.1016/j.ijms.2006.01.010
中图分类号
O64 [物理化学(理论化学)、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号
070203 ; 070304 ; 081704 ; 1406 ;
摘要
The study of the gas-phase reactions of the Si+ ions with nitrogen trifluoride (NF3) was performed by quadrupole ion trap mass spectrometry and ab initio calculations. Experimental results display a thermodynamically favoured reaction cascade starting from the reactants corresponding to multiple fluorine abstraction, which ultimately yields neutral fluorosilane by fluoride abstraction. A parallel, slightly endothermic channel is observed starting from the reactants and generating the NF2+ and SiF products. The study of the potential energy hypersurface of the Si+(P-2) + NF3 system evidenced the initial formation of the N-coordinated Si+-NF3 adduct. Subsequent rearrangements and atom migrations lead to the FSi+-NF2 isomer, whose dissociation yields SiF+ and NF2 as products. Theoretical energy profiles show that this pathway is strongly exothermic (about - 100 kcal mol(-1)) and that the dissociation of the FSi+-NF2 species to the endothermic (+6 kcal mol(-1)) channel products (NF2+ and SiF) is extremely unlikely for ground-state reactants. (C) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:225 / 231
页数:7
相关论文
共 37 条
[1]   Nitrogen trifluoride as a bifunctional Lewis base:: Implications for the adsorption of NF3 on solid surfaces [J].
Antoniotti, P ;
Borocci, S ;
Grandinetti, F .
EUROPEAN JOURNAL OF INORGANIC CHEMISTRY, 2004, (05) :1125-1130
[2]   A computational investigation on the mechanism of the reaction between O(1D) and NF3 [J].
Antoniotti, P ;
Grandinetti, F .
CHEMICAL PHYSICS LETTERS, 2002, 366 (5-6) :676-682
[3]   Li+ ion affinities of global-warming perfluorocarbons [J].
Arulmozhiraja, S ;
Fujii, T .
JOURNAL OF PHYSICAL CHEMISTRY A, 2000, 104 (42) :9613-9618
[4]  
BARTMESS JE, 1983, VACUUM, V33, P153
[5]   MOLLER-PLESSET THEORY FOR ATOMIC GROUND-STATE ENERGIES [J].
BINKLEY, JS ;
POPLE, JA .
INTERNATIONAL JOURNAL OF QUANTUM CHEMISTRY, 1975, 9 (02) :229-236
[6]   Etching of 6H-SiC and 4H-SiC using NF3 in a reactive ion etching system [J].
Casady, JB ;
Luckowski, ED ;
Bozack, M ;
Sheridan, D ;
Johnson, RW ;
Williams, JR .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1996, 143 (05) :1750-1753
[7]  
DITCHFIELD R, 1972, J CHEM PHYS, V56, P2252
[8]   CARBENE-LIKE CHARACTER OF GASEOUS-IONS - AN ION-CYCLOTRON RESONANCE AND ABINITIO INVESTIGATION OF THE REACTIONS OF DIFLUORONITRENIUM ION WITH METHANE [J].
FISHER, JJ ;
MCMAHON, TB .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1988, 110 (23) :7599-7604
[9]  
Fominski VY, 1996, APPL PHYS LETT, V68, P2243, DOI 10.1063/1.115872
[10]   SELF-CONSISTENT MOLECULAR-ORBITAL METHODS .23. A POLARIZATION-TYPE BASIS SET FOR 2ND-ROW ELEMENTS [J].
FRANCL, MM ;
PIETRO, WJ ;
HEHRE, WJ ;
BINKLEY, JS ;
GORDON, MS ;
DEFREES, DJ ;
POPLE, JA .
JOURNAL OF CHEMICAL PHYSICS, 1982, 77 (07) :3654-3665