A study of barrier-torch plasma jet system at atmospheric pressure

被引：6

作者：

Chichina, M.

Tichy, M.

Kudrna, P.

Grinevich, A.

Churpita, O.

Hubicka, Z.

Kment, S.

Olejnicek, J.

机构：

[1] Charles Univ Prague, Fac Math & Phys, Prague 18000, Czech Republic

[2] Acad Sci Czech Republ, Inst Phys, Dept Opt, Prague 18221 8, Czech Republic

来源：

CZECHOSLOVAK JOURNAL OF PHYSICS | 2006年 / 56卷

关键词：

plasma jet; plasma density; atmospheric pressure plasma; thin films;

D O I：

10.1007/s10582-006-0352-7

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We report on the application of barrier-torch plasma jet system-the novel plasma deposition system capable of working at atmospheric pressure in open air. Properties of ZnO and TiO2 thin films were analyzed by XRD and AFM. In the contribution we present the first results of spectroscopic measurements of Balmer H-beta line width aimed at estimating the electron density in plasma jet at atmospheric pressure.

引用

页码：B1212 / B1217

页数：6

共 14 条

[1] Fused hollow cathode cold atmospheric plasma [J].