High-voltage AlGaN/GaN HEMTs fabricated on free-standing GaN substrates

被引:0
作者
Akira, K. [1 ]
Asano, T. [1 ]
Tokuda, H. [1 ]
Kuzuhara, M. [1 ]
机构
[1] Univ Fukui, Grad Sch Engn, Fukui 9108507, Japan
来源
2013 IEEE INTERNATIONAL MEETING FOR FUTURE OF ELECTRON DEVICES, KANSAI (IMFEDK2013) | 2013年
关键词
component; free-standing GaN; AlGaN/GaN; HEMT; breakdown voltage;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes DC characteristics of AlGaN/GaN high electron mobility transistors (HEMTs) fabricated on a free-standing GaN substrate. The three terminal breakdown voltage of the fabricated HEMT with a gate length of 3 mu m exhibited a linear increase with increasing the gate-to-drain distance (L-gd), reaching more than 1200 V at L-gd=25 mu m. It was found that the ON/OFF ratio in the drain current was only 10(4), indicating the need for further improvements in buffer structure design.
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页数:2
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