CMOS MICRO-HOTPLATE ARRAY DESIGN FOR NANOMATERIAL-BASED GAS SENSORS

被引：1

作者：

Udrea, F. ^{[1
,3
]}

Ali, S. Z. ^{[1
]}

Gardner, J. W. ^{[2
,3
]}

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB2 1TN, England

[2] Univ Warwick, Sch Engn, Warwick, England

[3] Cambridge CMOS Sensors Ltd, Cambridge, England

来源：

CAS: 2008 INTERNATIONAL SEMICONDUCTOR CONFERENCE, PROCEEDINGS | 2008年

基金：

英国工程与自然科学研究理事会;

关键词：

Gas Sensor; Arrays; Nanomaterials; Micro-hotplate;

D O I：

10.1109/SMICND.2008.4703352

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we propose novel micro-hotplate arrays for use as nanomaterial-based gas micro sensors. In addition to the better selectivity offered by conventional micro-hotplate arrays, these arrays are more robust, and occupy a relatively small chip area. We present a 2x2 micro-hotplate array, as an example, along with its thermal characterisation. In addition we propose arrays connected to each other at wafer level (rather than just within a single chip), that are ideally suited for large volume fabrication of nanomaterial based gas sensors.

引用

页码：143 / +

页数：2

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