A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings

被引：53

作者：

Li, Xinghui ^{[1
]}

Gao, Wei ^{[1
]}

Shimizu, Yuki ^{[1
]}

Ito, So ^{[1
]}

机构：

[1] Tohoku Univ, Dept Nanomech, Sendai, Miyagi 980, Japan

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2014年 / 63卷 / 01期

基金：

日本学术振兴会;

关键词：

Interferometry; Laser; Structure; SURFACE ENCODER; LITHOGRAPHY; STAGE;

D O I：

10.1016/j.cirp.2014.02.001

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new two-axis Lloyd's mirror interferometer based on multi-beam interference is proposed. A square grating substrate with normal in the Z-axis is placed edge to edge with two rectangular mirrors with normals parallel to the XZ-plane (X-mirror) and the YZ-plane (Y-mirror), respectively. The angle between the substrate and each mirror is set to be larger than 90 degrees, so that the beams reflected by the mirrors can be superimposed with the direct beam at the substrate to produce two-dimensional (2D) diffraction grating structures in a single exposure. Sub-micron pitched 2D hole grating structures were fabricated and evaluated. (C) 2014 CIRP.

引用

页码：461 / 464

页数：4

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