Fabrication of 0.7 μm2 ridge waveguide in ion-sliced LiNbO3 by proton-exchange accelerated chemical etching

We fabricated low-loss ridge waveguides of 1.0 x 0.7 mu m(2) cross-sectional area in ion-sliced LiNbO3 crystals by chemical etching accelerated in proton-exchanged regions. Strong light confinement was obtained at 1.55 mu m wavelength. The waveguides are effective in implementing efficient and compact nonlinear-optic wavelength conversion devices. (C) 2015 The Japan Society of Applied Physics