Fabrication of 0.7 μm2 ridge waveguide in ion-sliced LiNbO3 by proton-exchange accelerated chemical etching

被引：7

作者：

Tanaka, Keisuke ^{[1
]}

Suhara, Toshiaki ^{[1
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Elect Elect & Informat Engn, Suita, Osaka 5650871, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2015年 / 54卷 / 12期

关键词：

LITHIUM-NIOBATE; CRYSTAL; GENERATION; DEVICES; FILMS;

D O I：

10.7567/JJAP.54.128002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We fabricated low-loss ridge waveguides of 1.0 x 0.7 mu m(2) cross-sectional area in ion-sliced LiNbO3 crystals by chemical etching accelerated in proton-exchanged regions. Strong light confinement was obtained at 1.55 mu m wavelength. The waveguides are effective in implementing efficient and compact nonlinear-optic wavelength conversion devices. (C) 2015 The Japan Society of Applied Physics

引用

页数：3

共 33 条

[21] Domain formation and polarization reversal under atomic force microscopy-tip voltages in ion-sliced LiNbO3 films on SiO2/LiNbO3 substrates
Gainutdinov, R. V.
Volk, T. R.
Zhang, H. H.
APPLIED PHYSICS LETTERS, 2015, 107 (16)
[22] LINBO3 OPTICAL WAVE-GUIDE FABRICATION BY TI INDIFFUSION AND PROTON-EXCHANGE - PROCESS, PERFORMANCES AND STABILITY
CANALI, C
CARNERA, A
MAZZOLDI, P
DELARUE, RM
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 517 : 119 - 127
[23] High-temperature proton-exchange as an efficient method for fabrication of low-loss LiNbO3 waveguides
Korkishko, YN
Fedorov, VA
Feoktistova, OY
Baranov, EA
Paderin, EM
INTEGRATED OPTICS DEVICES IV, 2000, 3936 : 147 - 155
[24] Chemical Etching Technique for Investigations of a Structure of Annealed and Unannealed Proton Exchange Channel LiNbO3 Waveguides
Azanova, I. S.
Shevtsov, D. I.
Zhundrikov, A. V.
Kichigin, V. I.
Petukhov, I. V.
Volyntsev, A. B.
FERROELECTRICS, 2008, 374 : 254 - 265
[25] FABRICATION OF MgO:LiNbO3 THIN FILM RIDGE WAVEGUIDE BY SURFACE-ACTIVATED BONDING AND ION SLICING
Tanaka, Keisuke
Suhara, Toshiaki
2013 18TH MICROOPTICS CONFERENCE (MOC), 2013,
[26] 1.5 μm TE-pass optical waveguide polarizers fabricated in LiNbO3 by proton exchange
Gao, Fubin
Jin, Feng
Xing, Rubing
Feng, Kecheng
Guangxue Xuebao/Acta Optica Sinica, 1995, 15 (08): : 1102 - 1105
[27] Ni:LiNbO3 ridge waveguide Mach-Zehnder electrooptic modulators fabricated by proton-exchanged wet etching
Chang, Wen-Ching
Journal of Optical Communications, 2000, 21 (02) : 73 - 78
[28] Soft proton exchange on periodically poled LiNbO3:: A simple waveguide fabrication process for highly efficient nonlinear interactions
Chanvillard, L
Aschiéri, P
Baldi, P
Ostrowsky, DB
de Micheli, M
Huang, L
Bamford, DJ
APPLIED PHYSICS LETTERS, 2000, 76 (09) : 1089 - 1091
[29] Fabrication and Modal Analysis of Ion-implanted LiNbO3 Ridge Optical Waveguide for Integrated Erbium-Doped Amplifiers
Malacarne, A.
Sher, S. M.
Montanari, G. B.
Sugliani, S.
Porzi, C.
Poti, L.
PS: 2009 INTERNATIONAL CONFERENCE ON PHOTONICS IN SWITCHING, 2009, : 108 - +
[30] NOVEL TI:LINBO3 RIDGE WAVEGUIDE LINEAR MODE CONFINEMENT MODULATOR FABRICATED BY REACTIVE ION-BEAM ETCHING.
Belanger, Michel
Yip, Gar Lam
Journal of Lightwave Technology, 1987, LT-5 (09) : 1252 - 1257

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