Fabrication of 0.7 μm2 ridge waveguide in ion-sliced LiNbO3 by proton-exchange accelerated chemical etching

被引：7

作者：

Tanaka, Keisuke ^{[1
]}

Suhara, Toshiaki ^{[1
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Elect Elect & Informat Engn, Suita, Osaka 5650871, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2015年 / 54卷 / 12期

关键词：

LITHIUM-NIOBATE; CRYSTAL; GENERATION; DEVICES; FILMS;

D O I：

10.7567/JJAP.54.128002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We fabricated low-loss ridge waveguides of 1.0 x 0.7 mu m(2) cross-sectional area in ion-sliced LiNbO3 crystals by chemical etching accelerated in proton-exchanged regions. Strong light confinement was obtained at 1.55 mu m wavelength. The waveguides are effective in implementing efficient and compact nonlinear-optic wavelength conversion devices. (C) 2015 The Japan Society of Applied Physics

引用

页数：3

共 33 条

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Bulatova, Anna
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Volyntsev, Anatolii
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APPLIED SCIENCES-BASEL, 2023, 13 (04):
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Wang, Xue-Lin
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