Highly transparent RF magnetron-sputtered indium tin oxide films for a-Si:H/c-Si heterojunction solar cells amorphous/crystalline silicon

被引：18

作者：

Hussain, Shahzada Qamar ^{[1
,2
]}

Oh, Woong-Kyo ^{[3
]}

Ahn, Shihyun ^{[3
]}

Anh Huy Tuan Le ^{[3
]}

Kim, Sunbo ^{[1
]}

Iftiquar, S. M. ^{[3
]}

Velumani, Subramaniam ^{[3
,4
]}

Lee, Youngseok ^{[1
]}

Yi, Junsin ^{[1
,3
]}

机构：

[1] Sungkyunkwan Univ, Dept Energy Sci, Suwon 440746, South Korea

[2] COMSATS, Inst Informat & Technol, Dept Phys, Lahore 54000, Pakistan

[3] Sungkyunkwan Univ, Coll Informat & Commun Engn, Suwon 440746, South Korea

[4] CINVESTAV IPN, SEES, Dept Elect Engn, Mexico City 07360, DF, Mexico

来源：

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2014年 / 24卷

关键词：

ITO films; RF power; Carrier lifetime; Anti-reflection electrode; amorphous/crystalline silicon; ITO THIN-FILMS; ELECTRICAL-PROPERTIES; OPTICAL-PROPERTIES; WORK FUNCTION; POWER; TEMPERATURE;

D O I：

10.1016/j.mssp.2014.02.044

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We prepared highly transparent magnetron-sputtered indium tin oxide (ITO) films deposited at various RF powers for a-Si:H(p)/c-Si heterojunction solar cell applications. The surface morphology of ITO films improved in terms of an increase in grain size as the RF power increased. Rapid growth of the (400) plane was observed with increasing RF power, while the (222) plane remain unchanged. The ITO film deposited at 100 W showed the lowest resistivity of 3.8 x 10(-4) Omega cm and highest visible transmittance of 90.19%. The deposition rate and optical bandgap of ITO films were varied from 20 to 100 nm/min and from 3.68 to 3.77 eV for RF power from 50 to 250 W, respectively. Highly transparent ITO films were utilized as the front anti-reflection layer in heterojunctions with intrinsic thinlayer (HIT) solar cells showed the efficiency of 16.3% for RF power of 100 W. The HIT solar cells deposited at RF power of 100 W also exhibited higher carrier lifetime and implied voltage. (C) 2014 Elsevier Ltd. All rights reserved.

引用

页码：225 / 230

页数：6

共 27 条

[1] Optical and electrical properties of transparent conductive ITO thin films deposited by sol-gel process [J].

Alam, MJ ;

Cameron, DC .

THIN SOLID FILMS, 2000, 377 :455-459

[2] Effects of Growth Temperature on the Properties of ZnO Thin Films Grown by Radio-frequency Magnetron Sputtering [J].

Cho, Shinho .

TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, 2009, 10 (06) :185-188

[3]

Como NH, 2010, SOL ENERG MAT SOL C, V94, P62

[4] rf-Magnetron sputtered ITO thin films for improved heterojunction solar cell applications [J].

Dao, Vinh Ai ;

Choi, Hyungwook ;

Heo, Jongkyu ;

Park, Hyeongsik ;

Yoon, Kichan ;

Lee, Youngseok ;

Kim, Yongkuk ;

Lakshminarayan, Nariangadu ;

Yi, Junsin .

CURRENT APPLIED PHYSICS, 2010, 10 (03) :S506-S509

[5] Simulation and study of the influence of the buffer intrinsic layer, back-surface field, densities of interface defects, resistivity of p-type silicon substrate and transparent conductive oxide on heterojunction with intrinsic thin-layer (HIT) solar cell [J].

Dao, Vinh Ai ;

Heo, Jongkyu ;

Choi, Hyungwook ;

Kim, Yongkuk ;

Park, Seungman ;

Jung, Sungwook ;

Lakshminarayan, Nariangadu ;

Yi, Junsin .

SOLAR ENERGY, 2010, 84 (05) :777-783

[6] The role of oxygen and hydrogen partial pressures on structural and optical properties of ITO films deposited by reactive rf-magnetron sputtering [J].

Das, Rajesh ;

Adhikary, Koel ;

Ray, Swati .

APPLIED SURFACE SCIENCE, 2007, 253 (14) :6068-6073

[7] Effect of rf power on the properties of ITO thin films deposited by plasma enhanced reactive thermal evaporation on unheated polymer substrates [J].

Nunes de Carvalho, C. ;

Luis, A. ;

Conde, O. ;

Fortunato, E. ;

Lavareda, G. ;

Amaral, A. .

Journal of Non-Crystalline Solids, 2002, 299-302 :1208-1212

[8]

Fesquet L., 2009, 2009 34th IEEE Photovoltaic Specialists Conference PVSC, P000754, DOI DOI 10.1109/PVSC.2009.5411173

[9] Influence of high work function ITO:Zr films for the barrier height modification in a-Si:H/c-Si heterojunction solar cells [J].

Hussain, Shahzada Qamar ;

Kim, Sunbo ;

Ahn, Shihyun ;

Balaji, Nagarajan ;

Lee, Youngseok ;

Lee, Jae Hyeong ;

Yi, Junsin .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2014, 122 :130-135

[10] RF magnetron sputtered indium tin oxide films with high transmittance and work function for a-Si:H/c-Si heterojunction solar cells [J].

Hussain, Shahzada Qamar ;

Oh, Woong-Kyo ;

Ahn, ShiHyun ;

Le, Anh Huy Tuan ;

Kim, Sunbo ;

Lee, Youngseok ;

Yi, Junsin .

VACUUM, 2014, 101 :18-21

← 1 2 3 →