Domain structures in epitaxial Pb(Zr0.68,Ti0.32)O3 thin films

被引:12
作者
Saito, K
Oikawa, T
Yamaji, I
Akai, T
Funakubo, H
机构
[1] Philips Japan, Sagamihara, Kanagawa 2280803, Japan
[2] Tokyo Inst Technol, Interdisciplinary Grad Sch, Dept Innovat & Engineered Mat, Midori Ku, Yokohama, Kanagawa 2268502, Japan
关键词
high resolution X-ray diffraction; metalorganic chemical vapor deposition; oxides; ferroelectric materials;
D O I
10.1016/S0022-0248(01)01981-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Domain structures and their volume fraction in (001)-, (101)- and (111)-oriented epitaxial Pb(Zr0.6Ti0.4)O-3 (PZT) films grown on (001), (110) and (111) SrTiO3 (STO) single crystal substrates, respectively, were characterized by using a high-resolution X-ray diffraction reciprocal space mapping (RSM) technique. The results of RSM revealed the presence of (10 (1) over bar) and (11 (1) over bar) orientation as well as (110) and (111) orientations for the films grown on (110) and (111) STO substrates, respectively, although (001)-oriented film had (001)-oriented simple domain structure. These multiple domain configurations seemed to be introduced by {100} and {101} twin domain boundaries. The RSM analysis also showed that the relative volume fractions of (10 (1) over bar) and (11 (1) over bar) orientations were 22% and 52% against (110) and (111) orientations, respectively. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:464 / 467
页数:4
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