共 19 条
[5]
INVESTIGATION AND COMPENSATION OF THE NONLINEARITY OF HETERODYNE INTERFEROMETERS
[J].
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING,
1992, 14 (02)
:91-98
[7]
Validation of a single fibre-fed heterodyne laser interferometer with nanometre uncertainty
[J].
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,
2005, 29 (02)
:229-236
[10]
Quenelle R., 1983, HEWLETT-PACKARD J, V34, P10