Fully vertical-coupling and one-step etching subwavelength binary blazed grating coupler

被引：0

作者：

Yang, Junbo ^{[1
,2
]}

Wu, Wenjun ^{[1
]}

Huang, Jie ^{[1
]}

Chen, Dingbo ^{[1
]}

Zhang, Jingjing ^{[1
]}

机构：

[1] Natl Univ Def Technol, Ctr Mat Sci, Changsha 410073, Hunan, Peoples R China

[2] Peking Univ, State Key Lab Adv Opt Commun Syst & Networks, Beijing 100871, Peoples R China

来源：

INTERNATIONAL CONFERENCE ON OPTOELECTRONICS AND MICROELECTRONICS TECHNOLOGY AND APPLICATION | 2017年 / 10244卷

基金：

中国国家自然科学基金;

关键词：

Grating coupler; Coupling efficiency; Rigorous coupled-wave analysis; Finite difference time domain; INSULATOR WAVE-GUIDES; HIGH-EFFICIENCY;

D O I：

10.1117/12.2258710

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We proposed a fully vertical-coupling and one-step etching subwavelength binary blazed grating (BBG) coupler with coupling efficiencies exceeding 80% at a wavelength of 1.55 mu m. Based on reflector grating and Bragg bottom reflector layer, the coupling efficiency gets its maximum 90% when lambda is equal to 1.535 mu m with the 1 dB wavelength bandwidth is around 35nm. The BBG is formed with multiple rectangular pillars having different widths and uniform height, which is a kind of binary version of the triangular tooth shape of the blazed grating and can be easily fabricated by only one etching step. It is CMOS compatible and available for mass production.

引用

页数：8

共 29 条

[1] An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics [J].

Antelius, Mikael ;

Gylfason, Kristinn B. ;

Sohlstrom, Hans .

OPTICS EXPRESS, 2011, 19 (04) :3592-3598

[2] Wideband subwavelength gratings for coupling between silicon-on-insulator waveguides and optical fibers [J].

Chen, Xia ;

Xu, Ke ;

Cheng, Zhenzhou ;

Fung, Christy K. Y. ;

Tsang, Hon K. .

OPTICS LETTERS, 2012, 37 (17) :3483-3485

[3] Polarization-independent grating couplers for silicon-on-insulator nanophotonic waveguides [J].

Chen, Xia ;

Tsang, Hon K. .

OPTICS LETTERS, 2011, 36 (06) :796-798

[4] Fabrication-Tolerant Waveguide Chirped Grating Coupler for Coupling to a Perfectly Vertical Optical Fiber [J].

Chen, Xia ;

Li, Chao ;

Tsang, Hon Ki .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2008, 20 (21-24) :1914-1916

[5] Broadband focusing grating couplers for suspended-membrane waveguides [J].

Cheng, Zhenzhou ;

Chen, Xia ;

Wong, Chi Yan ;

Xu, Ke ;

Tsang, Hon Ki .

OPTICS LETTERS, 2012, 37 (24) :5181-5183

[6] Fully etched apodized grating coupler on the SOI platform with-0.58 dB coupling efficiency [J].

Ding, Yunhong ;

Peucheret, Christophe ;

Ou, Haiyan ;

Yvind, Kresten .

OPTICS LETTERS, 2014, 39 (18) :5348-5350

[7] Polarization beam splitter using a binary blazed grating coupler [J].

Feng, Junbo ;

Zhou, Zhiping .

OPTICS LETTERS, 2007, 32 (12) :1662-1664

[8] Single etch grating couplers for mass fabrication with DUV lithography [J].

Halir, R. ;

Zavargo-Peche, L. ;

Xu, D. -X. ;

Cheben, P. ;

Ma, R. ;

Schmid, J. H. ;

Janz, S. ;

Densmore, A. ;

Ortega-Monux, A. ;

Molina-Fernandez, I. ;

Fournier, M. ;

Fedeli, J. -M. .

OPTICAL AND QUANTUM ELECTRONICS, 2012, 44 (12-13) :521-526

[9] Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure [J].

Halir, R. ;

Cheben, P. ;

Schmid, J. H. ;

Ma, R. ;

Bedard, D. ;

Janz, S. ;

Xu, D. -X. ;

Densmore, A. ;

Lapointe, J. ;

Molina-Fernandez, I. .

OPTICS LETTERS, 2010, 35 (19) :3243-3245

[10] Recent Advances in Silicon Waveguide Devices Using Sub-Wavelength Gratings [J].

Halir, Robert ;

Ortega-Monux, Alejandro ;

Schmid, Jens H. ;

Alonso-Ramos, Carlos ;

Lapointe, Jean ;

Xu, Dan-Xia ;

Gonzalo Wangueemert-Perez, J. ;

Molina-Fernandez, Inigo ;

Janz, Siegfried .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2014, 20 (04)

← 1 2 3 →