Laser micromachining of goldblack coatings

被引:6
作者
Nelms, N. [1 ]
Dowson, J.
Rizvi, N.
Rohr, T.
机构
[1] Univ Leicester, Space Res Ctr, Leicester LE1 7RH, Leics, England
[2] Univ Wales, IBMM Laser Micromachining Ctr, Bangor LL57 1UT, Gwynedd, Wales
[3] European Space Agcy, Estec, Mat & Proc Div, NL-2200 AG Noordwijk, Netherlands
关键词
D O I
10.1364/AO.45.006977
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Goldblack deposits have been used as high-absorption coatings for thermal infrared detectors for a number of years, principally on large single, or few pixel detectors. We present a new technique that allows the benefits of goldblack to be applied to the current generation of small pixel silicon micromachined thermal infrared detectors. (c) 2006 Optical Society of America.
引用
收藏
页码:6977 / 6981
页数:5
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