Ultrasonic actuators for nanometre positioning

This paper deals with ultrasonic motors based on bimodal plate vibrations and their application to nanometre resolution stepper positioning systems. The concept of a linear ultrasonic motor drive capable of nanometric steps, long-range travel and reversible controlled motion is presented. The motor concept developed is based on the superposition of a longitudinal and bending vibrations of a rectangular resonator. The ultrasonic motor model based on system identification via discrete observations and prediction has been developed for control applications. The control algorithm for ultrasonic motors has been developed and theoretical investigations have been made. The open loop positioning system with designed stepper ultrasonic drive produced 10 nm resolution and 5% displacement repeatability. The system with computer controlled position feedback has shown 0.3 mu m positioning accuracy over the 100 mm positioning range. (C) 2000 Elsevier Science B.V. All rights reserved.