Structural, Optical and Morphological Properties of TiO2/Ag/TiO2 Multilayer Films

被引:0
作者
Hasan, M. M. [1 ]
Haseeb, A. S. M. A. [1 ]
Saidur, R. [1 ]
Masjuki, H. H. [1 ]
Johan, M. R. [1 ]
机构
[1] Univ Malaya, Fac Engn, Kuala Lumpur 50603, Malaysia
来源
NANOSCIENCE AND NANOTECHNOLOGY | 2009年 / 1136卷
关键词
Multilayer coatings; dielectric material; structural and optical properties; TIO2; THIN-FILMS; HEAT-MIRROR; DEPOSITION;
D O I
暂无
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this investigation, TiO2/Ag/TiO2 multilayer-films were deposited on microscope glass slides with varying individual layer thicknesses by radio-frequency reactive magnetron sputtering. Prior to multilayer development, single layers of Ag and TiO2 were deposited and characterized. All the films were prepared at a moderately high pressure at room temperature. It was found that single layer of TiO2 showed anatase polycrystalline structure. It also exhibited high visible transmittance of above 80% and higher refractive index of 2.31 at a wavelength of 550 ran. The indirect optical band gap of the TiO2 films was estimated as 3.39 eV. The Ag single layer films were found to be crystalline with a very high reflectance for IR (Infra-red) light. Finally, the multilayers have been deposited and characterized by X-ray diffraction, UV-visible-IR spectrophotometry, scanning electron microscopy and profilometry.
引用
收藏
页码:229 / 233
页数:5
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