MICROMECHANICAL RING RESONATORS WITH A 2D PHONONIC CRYSTAL SUPPORT FOR MECHANICAL ROBUSTNESS AND PROVIDING MASK MISALIGNMENT TOLERANCE

被引：0

作者：

Figeys, B. ^{[1
,2
]}

Nauwelaers, B. ^{[2
]}

Tilmans, H. A. C. ^{[1
]}

Rottenberg, X. ^{[1
]}

机构：

[1] IMEC, Heverlee, Belgium

[2] Katholieke Univ Leuven, ESAT, Leuven, Belgium

来源：

2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015) | 2015年

关键词：

MEMS; 2D phononic crystal; SiGe ring resonator;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the design of ring -type electrostatically transduced bulk acoustic wave resonators designed for increased shock and vibration resistance. This was achieved through a 2D Phononic Crystal (PnC) support. The PnC is designed to operate in its bandgap so that it acts as a non -propagating medium, hereby achieving simultaneously a mechanically strong and acoustically well -confined support. We manufactured SiGe-resonators at 137.8MHz with a Q -factor of around 17,000. Another feature of this design is the process tolerance of the Q -factor (within 5%) and the resonance frequency towards mask misalignment (<7 mu m) for the center support.

引用

页码：1016 / 1019

页数：4

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