Optically driven micropump produced by three-dimensional two-photon microfabrication

被引：173
作者：
Maruo, Shoji [1 ]
Inoue, Hiroyuki [1 ]
机构：
[1] Yokohama Natl Univ, Grad Sch Engn, Dept Mech Engn, Hodogaya Ku, Yokohama, Kanagawa 2408501, Japan
来源：
APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 14期
基金：
日本学术振兴会;
关键词：
D O I：
10.1063/1.2358820
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
An optically driven lobed micropump was developed using three-dimensional two-photon microfabrication. The two built-in rotors, 9 mu m in diameter, are cooperatively driven by means of time-divided scanning of a single laser beam. It was demonstrated that a tracer particle was moved by simultaneously rotating the two rotors. The velocity of the tracer particle was proportional to the rotation speed of the rotors in the range of 0.2-0.7 mu m/s. The flow rate was estimated to be sub-pL/min level. This ultralow flow rate will be useful for further integration and miniaturization of micro-total-analysis systems. (c) 2006 American Institute of Physics.
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  • [1] Synchronized laser micromanipulation of multiple targets along each trajectory by single laser
    Arai, F
    Yoshikawa, K
    Sakami, T
    Fukuda, T
    [J]. APPLIED PHYSICS LETTERS, 2004, 85 (19) : 4301 - 4303
  • [2] An integrated nanoliter DNA analysis device
    Burns, MA
    Johnson, BN
    Brahmasandra, SN
    Handique, K
    Webster, JR
    Krishnan, M
    Sammarco, TS
    Man, PM
    Jones, D
    Heldsinger, D
    Mastrangelo, CH
    Burke, DT
    [J]. SCIENCE, 1998, 282 (5388) : 484 - 487
  • [3] Microfluidics -: Sorting particles with light
    Glückstad, J
    [J]. NATURE MATERIALS, 2004, 3 (01) : 9 - 10
  • [4] Finer features for functional microdevices - Micromachines can be created with higher resolution using two-photon absorption.
    Kawata, S
    Sun, HB
    Tanaka, T
    Takada, K
    [J]. NATURE, 2001, 412 (6848) : 697 - 698
  • [5] A review of micropumps
    Laser, DJ
    Santiago, JG
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (06) : R35 - R64
  • [6] 3D manipulation of particles into crystal structures using holographic optical tweezers
    Leach, J
    Sinclair, G
    Jordan, P
    Courtial, J
    Padgett, MJ
    Cooper, J
    Laczik, ZJ
    [J]. OPTICS EXPRESS, 2004, 12 (01): : 220 - 226
  • [7] Microfluidic systems in proteomics
    Lion, N
    Rohner, TC
    Dayon, L
    Arnaud, IL
    Damoc, E
    Youhnovski, N
    Wu, ZY
    Roussel, C
    Josserand, J
    Jensen, H
    Rossier, JS
    Przybylski, M
    Girault, HH
    [J]. ELECTROPHORESIS, 2003, 24 (21) : 3533 - 3562
  • [8] Three-dimensional microfabrication with two-photon-absorbed photopolymerization
    Maruo, S
    Nakamura, O
    Kawata, S
    [J]. OPTICS LETTERS, 1997, 22 (02) : 132 - 134
  • [9] Force-controllable, optically driven micromachines fabricated by single-step two-photon micro stereolithography
    Maruo, S
    Ikuta, K
    Korogi, H
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2003, 12 (05) : 533 - 539
  • [10] Three-dimensional microfabrication by use of single-photon-absorbed polymerization
    Maruo, S
    Ikuta, K
    [J]. APPLIED PHYSICS LETTERS, 2000, 76 (19) : 2656 - 2658
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