Iterative solution of nonlinear dynamical system of an electrostatically actuated micro-cantilever

被引：0

作者：

Lan, Qiang ^{[1
,2
]}

Zhang, Jie ^{[3
]}

Liu, Qixin ^{[1
]}

Chen, Yanmao ^{[1
]}

机构：

[1] Sun Yat Sen Univ, Dept Mech, Guangzhou 510275, Guangdong, Peoples R China

[2] Tuv Rhelnland Guangdong Ltd, Guangzhou 510663, Guangdong, Peoples R China

[3] Inst Measurement & Testing Technol, Guangzhou 510030, Guangdong, Peoples R China

来源：

SENSORS, MEASUREMENT AND INTELLIGENT MATERIALS II, PTS 1 AND 2 | 2014年 / 475-476卷

基金：

中国国家自然科学基金;

关键词：

MEMS; micro-cantilever; nonlinear; iterative method; MEMS; SIMULATION;

D O I：

10.4028/www.scientific.net/AMM.475-476.1643

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents an iterative method to solve the nonlinear dynamical system of an electrostatically actuated micro-cantilever in MEMS. Different from some other iteration methods for nonlinear dynamical systems, no additional procedures have to be carried out to eliminate the so-called secular terms. In addition, an efficient approach is proposed to expand fractional functions into truncated Fourier series. That makes it possible to implement the iterative procedures. Importantly, all the iteration equations are purely linear. Numerical examples show that the solutions provided by the method are in excellent agreement with numerical ones. The effects of applied voltage, cubic nonlinear stiffness and squeeze film damping on vibration responses are discussed in details.

引用

页码：1643 / +

页数：2