A miniaturized TEM nanoindenter for studying material deformation in situ

被引：37

作者：

Bobji, M. S. ^{[1
]}

Ramanujan, C. S.

Pethica, J. B.

Inkson, B. J.

机构：

[1] Indian Inst Sci, Dept Mech Engn, Bangalore 560012, Karnataka, India

[2] Univ Oxford, Dept Mat, Oxford OX1 3PH, England

[3] Univ Sheffield, Dept Mat Engn, Sheffield S1 3JD, S Yorkshire, England

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2006年 / 17卷 / 06期

关键词：

in situ TEM; nanoindentation; deformation mechanisms; inertial sliders;

D O I：

10.1088/0957-0233/17/6/006

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A miniaturized nanoindenter system has been designed and fabricated to carry out localized in situ deformation studies in a high resolution transmission electron microscope (TEM). The coarse positioning is carried out with the help of small inertial drives so that the whole system could fit into the specimen holder of the JEOL 2010 microscope. The fine positioning is achieved with a piezoelectric tube and the force is measured with the help of a four bar flexible hinge spring element. The ability of the system to correlate the force-distance data with the events observed in TEM is demonstrated.

引用

页码：1324 / 1329

页数：6

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