A miniaturized TEM nanoindenter for studying material deformation in situ

被引：37
作者：
Bobji, M. S. [1 ]
Ramanujan, C. S.
Pethica, J. B.
Inkson, B. J.
机构：
[1] Indian Inst Sci, Dept Mech Engn, Bangalore 560012, Karnataka, India
[2] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
[3] Univ Sheffield, Dept Mat Engn, Sheffield S1 3JD, S Yorkshire, England
来源：
MEASUREMENT SCIENCE AND TECHNOLOGY | 2006年 / 17卷 / 06期
关键词：
in situ TEM; nanoindentation; deformation mechanisms; inertial sliders;
D O I：
10.1088/0957-0233/17/6/006
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A miniaturized nanoindenter system has been designed and fabricated to carry out localized in situ deformation studies in a high resolution transmission electron microscope (TEM). The coarse positioning is carried out with the help of small inertial drives so that the whole system could fit into the specimen holder of the JEOL 2010 microscope. The fine positioning is achieved with a piezoelectric tube and the force is measured with the help of a four bar flexible hinge spring element. The ability of the system to correlate the force-distance data with the events observed in TEM is demonstrated.
引用
收藏
页码：1324 / 1329
页数：6
相关论文
共 17 条
  • [1] Indentation mechanics of Cu-Be quantified by an in situ transmission electron microscopy mechanical probe
    Bobji, MS
    Pethica, JB
    Inkson, BJ
    [J]. JOURNAL OF MATERIALS RESEARCH, 2005, 20 (10) : 2726 - 2732
  • [2] Bobji MS, 2003, MATER RES SOC SYMP P, V778, P105
  • [3] BOBJI MS, 1999, THESIS INDIAN I SCI
  • [4] A high resolution long travel friction-drive micropositioner with programmable step size
    Chang, SH
    Li, SS
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (06) : 2776 - 2782
  • [5] Structure and strength of multilayers
    Clemens, BM
    Kung, H
    Barnett, SA
    [J]. MRS BULLETIN, 1999, 24 (02) : 20 - 26
  • [6] Tensile testing low density multilayers: Aluminum/titanium
    Josell, D
    van Heerden, D
    Read, D
    Bonevich, J
    Shechtman, D
    [J]. JOURNAL OF MATERIALS RESEARCH, 1998, 13 (10) : 2902 - 2909
  • [7] Cross-sectional time-resolved high-resolution transmission electron microscopy of atomic-scale contact and noncontact-type scannings on gold surfaces
    Kizuka, T
    Yamada, K
    Deguchi, S
    Naruse, M
    Tanaka, N
    [J]. PHYSICAL REVIEW B, 1997, 55 (12) : R7398 - R7401
  • [8] Mitchell TE, 1997, J AM CERAM SOC, V80, P1673, DOI 10.1111/j.1151-2916.1997.tb03037.x
  • [9] A SPRING-GUIDED MICROPOSITIONER WITH LINEARIZED SUBNANOMETER RESOLUTION
    NISHIMURA, K
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1991, 62 (08) : 2004 - 2007
  • [10] HARDNESS MEASUREMENT AT PENETRATION DEPTHS AS SMALL AS 20-NM
    PETHICA, JB
    HUTCHINGS, R
    OLIVER, WC
    [J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1983, 48 (04): : 593 - 606
12