Visual inspection management system

被引：0

作者：

Huang, SH ^{[1
]}

Lee, LY ^{[1
]}

Lou, CC ^{[1
]}

Ling, KR ^{[1
]}

机构：

[1] Tsmc Co, Hsinchu 300, Taiwan

来源：

ISSM 2000: NINTH INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING, PROCEEDINGS | 2000年

关键词：

inspection; yield; defect; training;

D O I：

10.1109/ISSM.2000.993669

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Using Information Technology to create the procedures for the in-line inspection training, quality control testing, audit and control etc, in order to improve the defect inspection process and enhance the fab yield. This system contains several sub-systems including the Checking Card System, the Image Exam System, the Defect Library & Training System, the Image Record System records. The Checking Card System is a communications system, established in the Lotus OA. When an operator finds a defective wafer, they use the system to submit the Check Card file to the process engineers. The Image Exam System is an exam system, making use of the Intranet, for the Inspectors and Engineers. The Defect Library & Training System, which is a defect image library system, includes many typical defective images. Finally, the Image Record System records images of defective wafers digitally and stores them as PC files. After implementing the integrated and useful system for the management and training of defect inspections, the system helps TSMC to improve the knowledge and skills of inspectors and engineers.

引用

页码：285 / 288

页数：4