The simulation on the microelectromechanical tunable F-P optical filter

The tunable F-P optical filters are employed in many devices for optical networks, for its wavelength selectivity is useful in WDM/DWDM systems. Various structures based on GaAs/InP have been developed by institutes and companies. All of them choose wavelength through their tunable resonance cavity length. The resonance cavity is the air gap between two plane-parallel distributed Bragg reflectors (DBR). The gap length is changed by applying tuning voltage on one of the DBR, which is mounted on the beams and moved by electrostatic attraction. The thickness of DBR is about 2mum, which is determined by the working wavelength on the optical networks, and its size is about 30mum x 30mum. So the DBR is process as a plate in the finite element model, but in many other papers it is considered as a rigid body directly. In this paper, we have investigated the mechanical properties of several typical structures such as deflection and natural frequency, etc. Many qualitative relations among the device performance, structures and structure parameters are provided on the base of simulation with the finite element models in the electric and mechanical physics environments.