Crystallization behavior of PZT film prepared by sol-gel route

被引：5
作者：
Yang, F.
Wang, L.
Zheng, F.
Fei, W. D.
机构：
[1] Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China
[2] Harbin Inst Technol, Dept Appl Phys, Harbin 150001, Peoples R China
来源：
JOURNAL OF MATERIALS SCIENCE | 2006年 / 41卷 / 18期
关键词：
D O I：
10.1007/s10853-006-0340-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The X-ray scattering measurements were used to investigate Pb(Zr,Ti)O-3 films prepared by sol-gel process. From analysis of specular and off-specular X-ray reflectivities, the morphology of nanoscale pores in Pb(Zr,Ti)O-3 film was determined by adjusting a model to the observed data. It is found that nanoscale pores in the films were closely attributed to the precursor with higher molar concentration. Furthermore, nanoscale pores present a certain degree of order in the direction normal to the film surface, which mainly distribute near the interface between films and substrate. The pores gradually close with annealing time increasing, and the closing process of the pores leads to pit formation in the film surface.
引用
收藏
页码：5820 / 5827
页数：8
相关论文
共 12 条
[1]  
Buttard D, 1999, SOLID STATE COMMUN, V109, P1, DOI 10.1016/S0038-1098(98)00531-6
[2]   X-ray scattering study of porous silicon layers [J].
Chamard, V ;
Dolino, G ;
Stettner, J .
PHYSICA B-CONDENSED MATTER, 2000, 283 (1-3) :135-138
[3]   Layered perovskites with giant spontaneous polarizations for nonvolatile memories [J].
Chon, U ;
Jang, HM ;
Kim, MG ;
Chang, CH .
PHYSICAL REVIEW LETTERS, 2002, 89 (08) :1-087601
[4]   Growth and measurements of ferroelectric lead zirconate titanate on diamond by pulsed laser deposition [J].
Du, H ;
Johnson, DW ;
Zhu, W ;
Graebner, JE ;
Kammlott, GW ;
Jin, S ;
Rogers, J ;
Willett, R ;
Fleming, RM .
JOURNAL OF APPLIED PHYSICS, 1999, 86 (04) :2220-2225
[5]   Neutron and X-ray reflectivity analysis of ceramic-metal materials [J].
Gibaud, A ;
Sella, C ;
Maaza, M ;
Sung, L ;
Dura, JA ;
Satija, SK .
THIN SOLID FILMS, 1999, 340 (1-2) :153-158
[6]   Highly a-axis-oriented Nb-doped Pb(TixZr1-x)O3 thin films grown by sol-gel technique for uncooled infrared dectors [J].
Han, H ;
Song, XY ;
Zhong, J ;
Kotru, S ;
Padmini, P ;
Pandey, RK .
APPLIED PHYSICS LETTERS, 2004, 85 (22) :5310-5312
[7]   Tunable absorption of Au-Al2O3 nanocermet thin films and its morphology [J].
Hazra, S ;
Gibaud, A ;
Sella, C .
APPLIED PHYSICS LETTERS, 2004, 85 (03) :395-397
[8]   Morphology of nanocermet thin films:: X-ray scattering study [J].
Hazra, S ;
Gibaud, A ;
Désert, A ;
Sella, C ;
Naudon, A .
PHYSICA B, 2000, 283 (1-3) :97-102
[9]   Structure and non-uniform strain analysis on p-type porous silicon by X-ray reflectometry and X-ray diffraction [J].
LopezVillegas, JM ;
Navarro, M ;
Papadimitriou, D ;
Bassas, J ;
Samitier, J .
THIN SOLID FILMS, 1996, 276 (1-2) :238-240
[10]  
Pintilie L, 2004, SENSOR ACTUAT A-PHYS, V115, P185, DOI [10.1016/j.sna.2004.01.020, 10.1016/j.sna.2003.01.020]
12