Room-Temperature Terahertz Antenna-Coupled Microbolometers with Titanium Thermistor and Heater

被引：2

作者：

Hiromoto, Norihisa ^{[1
]}

Banerjee, Amit ^{[2
]}

Elamaran, Durgadevi ^{[3
]}

Aoki, Makoto ^{[4
]}

Apriono, Catur ^{[5
]}

Satoh, Hiroaki ^{[6
]}

Bruendermann, Erik ^{[7
]}

Rahardjo, Eko Tjipto ^{[5
]}

Inokawa, Hiroshi ^{[6
]}

机构：

[1] Shizuoka Univ, Grad Sch Integrated Sci & Technol, Hamamatsu, Shizuoka, Japan

[2] Natl Univ Singapore, Dept Elect & Comp Engn, Lower Kent Ridge Rd, Singapore, Singapore

[3] Shizuoka Univ, Grad Sch Sci & Technol, Hamamatsu, Shizuoka, Japan

[4] Natl Inst Informat & Commun Technol NICT, Appl Electromag Res Inst, Tokyo, Japan

[5] Univ Indonesia, Fac Engn, Dept Elect Engn, Depok, Indonesia

[6] Shizuoka Univ, Res Inst Elect, Hamamatsu, Shizuoka, Japan

[7] Karlsruhe Inst Technol KIT, Inst Beam Phys & Technol IBPT, Karlsruhe, Germany

来源：

2019 16TH INTERNATIONAL CONFERENCE ON QUALITY IN RESEARCH (QIR) / INTERNATIONAL SYMPOSIUM ON ELECTRICAL AND COMPUTER ENGINEERING | 2019年

关键词：

terahertz (THz); detector; array; bolometer; room temperature; uncooled; nondestructive; sensing; thermistor; temperature coefficient of resistance (TCR); meander line; responsivity; noise equivalent power (NEP); QUANTUM-CASCADE-LASER; PHOTOCONDUCTOR;

D O I：

10.1109/qir.2019.8898200

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

High-detectivity room-temperature terahertz (THz) detectors are expected to be utilized in spectroscopy and imaging for such applications as inspection for safety, nondestructive sensing in industry and construction, noninvasive examination for medicine and pharmacy. We have studied THz antenna-coupled bolometers with titanium (Ti) thermistor and heater fabricated on a high-resistivity silicon (Si) substrate with MEMS structures in order to develop uncooled high-performance sensors. In this paper, we report the study on design, electromagnetic (EM) and thermal simulation, fabrication, experiment of THz-wave measurement, and evaluation of performance for single-detector devices, by which large THz array detectors are easily developed. We have achieved good performance as low noise-equivalent power (NEP) of the orders of 10(-11) W/Hz(1/2) and response frequency of 5.5 kHz by studying a Ti thermistor with thin meander line for the THz antenna-coupled bolometer.

引用

页码：205 / 209

页数：5

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