Effect of (Ba+Sr)/Ti ratio on dielectric and tunable properties of Ba0.6Sr0.4TiO3 thin film prepared by sol-gel method

被引：7

作者：

Zhu Wei-cheng ^{[1
]}

Peng Dong-wen ^{[1
]}

Cheng Jin-rong ^{[1
]}

Meng Zhong-yan ^{[1
]}

机构：

[1] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China

来源：

TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA | 2006年 / 16卷 / s261-s265期

基金：

中国国家自然科学基金;

关键词：

Ba0.6Sr0.4TiO3 thin film; (Ba plus Sr)/Ti ratio; sol-gel method; dielectric properties;

D O I：

10.1016/S1003-6326(06)60187-8

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

Ba0.6Sr0.4TiO3 (BST) thin films were fabricated on Pt coated Si (100) substrates by sol-gel techniques with molar ratio of (Ba+Sr) to Ti changing from 0.76 to 1.33. The effect of (Ba+Sr)/Ti ratio deviating from the stoichiometry on microstructure, grain growth, dielectric and tunable properties of BST thin films were investigated. TiO2 and (Ba,Sr)(2)TiO4 were found as a second phase at the ratios of 0.76 and 1.33, respectively. The variation of the ratio reveals more significant effect on the grain size in B-site rich samples than that in A-site rich samples. The dissipation factor decreases rapidly from 0.1 to 0.01 at 1 MHz with decreasing (Ba+Sr)/Ti ratio. The tunability increases with decreasing ratio from 1.33 to 1.05, and then decreases with decreasing ratio from 1.05 to 0.76. The film with (Ba+Sr)/Ti ratio of 1.05 has a maximum tunability of 32% and a dissipation factor of 0.03 at 1 MHz.

引用

页码：S261 / S265

页数：5

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