Synthesis and characterization of hydrogenated amorphous silicon-carbon films with blue-green emission

被引：3
|
作者：
Yu, YH [1 ]
Wu, ZC [1 ]
Ren, ZX [1 ]
Liu, XH [1 ]
Zou, SC [1 ]
Wong, SP [1 ]
Wilson, IH [1 ]
机构：
[1] CHINESE UNIV HONG KONG,DEPT ELECT ENGN,HONG KONG,HONG KONG
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1997年 / 127卷
关键词：
D O I：
10.1016/S0168-583X(96)00952-4
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Hydrogenated amorphous silicon-carbide films were synthesized by reactive ion beam deposition utilizing methane (CH4) in a single ion Kaufman source system, Composition and microstructure of the films were characterized by Rutherford Backscattering (RES), Fourier Transform Infrared (FT-IR) and X-ray Diffraction (XRD) spectra. Optical properties of the films were investigated using Ultraviolet (UV) transmittance spectroscopy and photoluminescence. The results reveal that the optical band gap (E-g) of a-SiCx:H films with a carbon content of 56.3 at.% is 3.5 eV. By photoluminescence, blue-green emission from the films was observed at room temperature (RT). The mechanism of the blue-green emission was also discussed.
引用
收藏
页码：337 / 340
页数：4
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