Effect of lattice matching on microstructure and electrical conductivity of epitaxial ARuO3 (A = Sr, Ca and Ba) thin films prepared on (001) LaAlO3 substrates by laser ablation

被引：8

作者：

Ito, Akihiko ^{[1
]}

Masumoto, Hiroshi ^{[2
]}

Goto, Takashi ^{[3
]}

机构：

[1] Tohoku Univ, Inst Multidisciplinary Res Adv Mat, Sendai, Miyagi 9808577, Japan

[2] Tohoku Univ, Interdisciplinary Res Ctr, Sendai, Miyagi 9808578, Japan

[3] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808578, Japan

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 19期

关键词：

Laser ablation; Alkaline earth metal ruthenate; Epitaxial thin film; Lattice matching; Microstructure; Electrical conductivity; CRYSTAL-STRUCTURE; SINGLE-CRYSTALS; SRRUO3; CARUO3; SRTIO3; DEPOSITION; PRESSURE; BARUO3; IRRADIATION; STRAIN;

D O I：

10.1016/j.tsf.2009.02.021

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

(001) SrRuO3 (SRO), (001) CaRuO3 (CRO) and (205) BaRuO3 (BRO) thin films were epitaxially grown on (001) LaAlO3 substrates by laser ablation, and the effect of lattice matching on the microstructure and electrical conductivity was investigated. (001) SRO and (001) CRO thin films had a terrace with orthogonal step structure, whereas (205) BRO thin film had an orthogonal structure with tetragonal grains. Epitaxial thin films showed metallic conduction, and the (001) CRO thin films exhibited the highest electrical conductivity, i.e. 1.5 x 10(5) S m(-1), among the (001) SRO, (001) CRO and (205) BRO thin films. The smaller misfit between thin film and substrate could be associated with the higher electrical conductivity. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：5616 / 5620

页数：5

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