Characteristics of Different Frequency Ranges in Scanning Electron Microscope Images

被引：1

作者：

Sim, K. S. ^{[1
]}

Nia, M. E. ^{[1
]}

Tan, T. L. ^{[1
]}

Tso, C. P. ^{[1
]}

Ee, C. S. ^{[1
]}

机构：

[1] Multimedia Univ, Fac Engn & Technol, Melaka 75450, Malaysia

来源：

PROCEEDINGS OF THE 23RD SCIENTIFIC CONFERENCE OF MICROSCOPY SOCIETY MALAYSIA (SCMSM 2014) | 2015年 / 1669卷

关键词：

NOISE RATIO ESTIMATION;

D O I：

10.1063/1.4919194

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We demonstrate a new approach to characterize the frequency range in general scanning electron microscope (SEM) images. First, pure frequency images are generated from low frequency to high frequency, and then, the magnification of each type of frequency image is implemented. By comparing the edge percentage of the SEM image to the self-generated frequency images, we can define the frequency ranges of the SEM images. Characterization of frequency ranges of SEM images benefits further processing and analysis of those SEM images, such as in noise filtering and contrast enhancement.

引用

页数：6

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